Hollow waveguides for N/spl times/N optical cross connect switch

K. Madkour, H. Maaty, D. Khalil
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Abstract

In this work we present a new structure based on the use of hollow dielectric waveguides as the guiding medium between the switch nodes (mirrors) for the N/spl times/N optical cross connect switch. The hollow waveguides are designed and fabricated by deep reactive ion etching (DRIE) on SOI wafers. The optical performance, measured at the 1550 nm shows propagation loss lower than 0.08dB/mm, a polarization dependant loss PDL less than 0.15 dB and a wavelength dependant loss WDL less than 0.152 dB.
用于N/spl倍/N光交叉连接开关的空心波导
在这项工作中,我们提出了一种基于使用中空介质波导作为开关节点(反射镜)之间的引导介质的新结构,用于N/spl倍/N光交叉连接开关。采用深度反应离子刻蚀法在SOI晶圆上设计并制备了空心波导。在1550 nm处测量的光学性能表明,传输损耗小于0.08dB/mm,偏振相关损耗PDL小于0.15 dB,波长相关损耗WDL小于0.152 dB。
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