Design optimization for NEM relays implemented in BEOL layers

Abstract

This work discusses design considerations for a nano-electro-mechanical (NEM) relay implemented with a standard CMOS fabrication process utilizing the back-end-of-line (BEOL) metal layers. The quasi-static and dynamic performances of the relay are simulated using Coventor MEMS+. Various design trade-offs are discussed. A design optimization scheme for minimizing the energy-delay product is presented.