Performance investigation of charge plasma based dual material gate junctionless transistor

S. Amin, S. Anand, R. Sarin
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引用次数: 1

Abstract

In this paper, the design aspects of charge plasma based junctionless transistors viz., (1) doping-less dual material double gate (DL-DMDG) junctionless transistor and (2) Gate stacked architecture of DL-DMDG JLT are used to evaluate the device performances. The n+ source/drain regions are formed by employing charge plasma technique over the intrinsic silicon. Dual material gate architecture helps to minimize the delay and gate stacked architecture helps to have better control over channel region. The performances metrics such as, subthreshold slope (SS), fluctuation in threshold voltage (VT), drain induced barrier lowering (DIBL), intrinsic delay and energy delay product are analysed for different silicon film thickness (Tsi), gate length (LG), and gate work-functions difference (δW). The comparative analysis has been done with conventional heavily doped dual material double gate (DMDG) JLT and its gate stacked architecture (GSDMDG) of JLT. The SS, VT, intrinsic delay and energy delay product of DL-DMDG and DL-GSDMDG JLTs are less sensitive to the variations in aforementioned device parameters as compared to conventional doped DMDG and GSDMDG JLTs. Moreover, DL-GSDMDG JLT shows remarkable improvement over other mentioned device configurations.
电荷等离子体双材料栅极无结晶体管的性能研究
本文从电荷等离子体无结晶体管的设计(1)无掺杂双材料双栅(DL-DMDG)无结晶体管和(2)DL-DMDG JLT的栅极堆叠结构两方面对器件性能进行了评价。利用电荷等离子体技术在本征硅上形成了n+源漏区。双材料栅极结构有助于减少延迟,栅极堆叠结构有助于更好地控制通道区域。分析了不同硅膜厚度(Tsi)、栅极长度(LG)和栅极功函数差(δW)下阈值斜率(SS)、阈值电压波动(VT)、漏极势垒降低(DIBL)、本征延迟和能量延迟积等性能指标。对比分析了传统的重掺杂双材料双栅(DMDG) JLT及其栅极堆叠结构(GSDMDG) JLT。与常规掺杂DMDG和GSDMDG jlt相比,DL-DMDG和DL-GSDMDG jlt的SS、VT、固有延迟和能量延迟积对上述器件参数的变化不太敏感。此外,DL-GSDMDG JLT比其他提到的器件配置表现出显著的改进。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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