Lead-free Piezoelectric Thin Films for Bio-medical Applications

Abstract

A systematic investigation of dielectric and piezoelectric properties of lead-free NKN films prepared by chemical solution deposition method is performed for Na/K = 50/50 composition. Among various lead-free materials, it is clarified that NKN films can be strong candidates for replacing PZT based piezoelectric thin films due to their reasonably good piezoelectric properties even if overall properties are somewhat worse than those of PZT based piezoelectrics. These results indicate that NKN films might be a promising lead-free piezoelectric system for a wide range of bio-compatible MEMS applications.