An approach of shrinking the substrate of multistage 2-D MEMS optical switch

Abstract

We propose a scheme in theory for any architecture of multistage 2-D MEMS to shrink the substrate for high cost performance. We take advantage of Gaussian beam to reduce the substrate size through the mirror radius, and give the theoretical derivation. By adopting the proposed architecture, we compare some multistage 2-D MEMS architecture in terms of the substrate size and the lens radius, and get some improved results.