SAW OFC strain sensor

Abstract

This paper presents results for a 250MHZ orthogonal frequency coded (OFC) surface acoustic wave (SAW) cantilever device on YZ LiNbO3. A 1-D model is presented which predicts the variation in the wave velocity with applied strain. A FEM analysis is conducted which verifies the strain on the cantilever and supports the 1-D model predictions. Predicted results from the FEM model are presented and are in good agreement with the measured SAW OFC cantilever delay line results. Initial results on a diaphragm micro-ablated cavity are also presented.