M. Okano, E. Omoda, Y. Maegami, Y. Atsumi, Y. Sakakibara, T. Kamei, M. Mori
{"title":"Hydrogenated amorphous silicon photonic devices on synthetic quartz glass substrate","authors":"M. Okano, E. Omoda, Y. Maegami, Y. Atsumi, Y. Sakakibara, T. Kamei, M. Mori","doi":"10.1109/GROUP4.2015.7305942","DOIUrl":null,"url":null,"abstract":"We have fabricated hydrogenated amorphous silicon (a-Si:H) photonic devices on a synthetic quartz glass substrate. a-Si:H-wire waveguides, ring resonators, and directional couplers were successfully fabricated using a i-line stepper lithograpy.","PeriodicalId":244331,"journal":{"name":"2015 IEEE 12th International Conference on Group IV Photonics (GFP)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE 12th International Conference on Group IV Photonics (GFP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GROUP4.2015.7305942","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
We have fabricated hydrogenated amorphous silicon (a-Si:H) photonic devices on a synthetic quartz glass substrate. a-Si:H-wire waveguides, ring resonators, and directional couplers were successfully fabricated using a i-line stepper lithograpy.