Hydrogenated amorphous silicon photonic devices on synthetic quartz glass substrate

M. Okano, E. Omoda, Y. Maegami, Y. Atsumi, Y. Sakakibara, T. Kamei, M. Mori
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Abstract

We have fabricated hydrogenated amorphous silicon (a-Si:H) photonic devices on a synthetic quartz glass substrate. a-Si:H-wire waveguides, ring resonators, and directional couplers were successfully fabricated using a i-line stepper lithograpy.
合成石英玻璃衬底上氢化非晶硅光子器件
我们在合成石英玻璃衬底上制备了氢化非晶硅(a- si:H)光子器件。a- si: h线波导、环形谐振器和定向耦合器使用i线步进光刻技术成功制造。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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