Non-linear transient current in thin polyimide films prepared by vapor deposition polymerization

S. Yoda, S. Sonehara, K. Miyairi
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引用次数: 2

Abstract

Two kinds of thin polyimide films are prepared by vapor deposition polymerization. One is annealed in air, and the other is annealed in a vacuum during imidization procedure. We have investigated electrical conduction in the two kinds of samples with low frequency voltage, and the difference between them have been discussed from the view point of ionic conduction. The samples annealed in air shows lead of current phase that due to the accumulated ionic space charge in the vicinity of the Al oxide layer at the Al-polyimide boundary. The samples annealed in a vacuum show lower conductivity and an anomalous current peak. The mechanism responsible for the current peak has been discussed in terms of diffusion and drift of space charges accumulated near the electrodes.
气相沉积聚合法制备聚酰亚胺薄膜的非线性瞬态电流
采用气相沉积聚合法制备了两种聚酰亚胺薄膜。一种是在空气中退火,另一种是在真空中退火。我们研究了两种样品在低频电压下的电导率,并从离子电导率的角度讨论了它们之间的区别。在空气中退火的样品显示出电流相铅,这是由于铝-聚酰亚胺边界附近的氧化铝层附近离子空间电荷积累所致。在真空中退火的样品显示出较低的电导率和异常电流峰值。从电极附近积聚的空间电荷的扩散和漂移的角度讨论了产生电流峰的机制。
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