Atmospheric plasma jet machining of an optical element made from borosilicate crown glass

Abstract

Atmospheric Plasma Jet Machining is performed on Borosilicate Crown Glass. A fluorine containing plasma jet is suitable for the etching of the material. A substrate surface temperature of about 325°C during processing is necessary for a controlled removal. The figure error can be corrected by a dwell time based deterministic process. The resulting surface roughness depends on the surface temperature of the processed sample.