Plasma Devices Based on the Plasma Lens Configuration - Basic Results and Application

Abstract

We review some recent developments of the electrostatic plasma lens and some novel plasma devices based on the 'plasma lens concept' of magnetic insulation of electrons and equipotentialization along magnetic field lines. The plasma lens configuration of crossed electric and magnetic fields provides an attractive and simple method for establishing a stable plasma discharge at low pressure, and has been used to develop some low cost, low maintenance plasma devices for ion cleaning, surface activation, and polishing of substrates prior to film deposition. Recent embodiments of these devices use permanent magnets and possess considerable flexibility with respect to spatial configuration. Results of preliminary experiments on the application of these devices to ion treatment and coating deposition are summarized