Medical applications of MEMS

Abstract

Exploiting the materials and processing techniques developed for integrated circuits, silicon micromachining technology has been responsible for fundamental improvements in many, diverse fields of biomedicine. As blood pressure sensors, chemical sensors, micro-chemical reaction and analysis systems, and micro-fluidic control systems, the impact of micromachining on biomedical applications has already been impressive, but is only now poised for dramatic advances. This paper will review current state-of-the-art biomedical applications of micromachining technology such as pressure sensors and biochemical sensors. In addition, we will discuss significant new biomedical innovations on the horizon which make use of micromachining techniques and processes.