{"title":"High Temperature Field Evaporation of Tantalum Emitter","authors":"O. L. Golubev, Blashenkov Nm, Lavrent'ev GYa","doi":"10.1109/IVNC.2006.335360","DOIUrl":null,"url":null,"abstract":"A magnetic atom probe is used to study the high temperature field evaporation of Ta emitters. Varying concentrations of Ta3+ and Ta2+ ions are observed within the 300-2500 K temperature range while Ta+ ions only exist at high temperatures. Increasing temperature leads to reduction of evaporation field intensity causing the decrease in the charges of ions","PeriodicalId":108834,"journal":{"name":"2006 19th International Vacuum Nanoelectronics Conference","volume":"140 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 19th International Vacuum Nanoelectronics Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVNC.2006.335360","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A magnetic atom probe is used to study the high temperature field evaporation of Ta emitters. Varying concentrations of Ta3+ and Ta2+ ions are observed within the 300-2500 K temperature range while Ta+ ions only exist at high temperatures. Increasing temperature leads to reduction of evaporation field intensity causing the decrease in the charges of ions