ESD Diode Devices Simulation and Analysis in a FinFET Technology

Abstract

As CMOS scales down to FinFET technology, the performance of ESD devices degenerates seriously. In this work, two types of ESD protection diodes, Gated Diode and STI Diode, are investigatedin 14nm FinFET technology. The corresponding 3D TCAD simulation helps to understand the working mechanism for the above two diodes.