A novel design of parallel piezoelectric six-degree-of-freedom accelerometer

Abstract

According to the drawback of elastic style six-degree-of-freedom (6-DOF) accelerometer, a novel parallel piezoelectric six-degree-of-freedom accelerometer is proposed. First, the operating principle and structure of the accelerometer is presented, then the finite element model of accelerometer is established by ANSYS analysis tools, and getting some parameters, such as output charge sensitivity, resonance frequency etc. Finally, on the basis of analysis of simulation results, a conclusion can be given that cross-axis sensitivity is less than 1%. The resonance frequency is more than 5900Hz, the accelerometer has simple and rational structure and all parameters meet requirement.