Investigation of Distortion and Damage of Mo-Si Multilayer Reflective Coatings with High Intensity UV Radiation

Abstract

We report on studies of optical distortion and damage thresholds of Mo-Si multilayer soft x-ray reflective coatings using 308 nm pulsed radiation from a XeCl excimer laser to simulate soft x-ray irradiation. Preliminary experimental results yielded values of 260 mJ/cm2 and 500 mJ/cm2 for distortion and damage thresholds.