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Freeform surface measurement by virtual differential confocal based on reference planes monitoring

Optical Metrology and Inspection for Industrial Applications IX Pub Date : 2022-12-21 DOI:10.1117/12.2656177
Wen-Bo Wang, Lirong Qiu, Weiqian Zhao
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基于参考面监测的虚拟微分共聚焦自由曲面测量
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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Optical Metrology and Inspection for Industrial Applications IX
Optical Metrology and Inspection for Industrial Applications IX
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