On the energy-optimal precise wafer stage positioning: Equivalence with minimal time optimality

Abstract

The minimal time optimality and the minimal energy optimality are often considered as competing approaches in the trajectory planning for precision movement of the wafer stages in electronic industry. We present here the theoretical and simulation results showing that with appropriate choice of the constraints these approaches are equivalent in the sense that they produce the same trajectory. The optimal control solver DIDO has been used in this research.