D. Gloess, U. Hartung, A. Drescher, J. Neidhardt, P. Frach, H. Bartzsch
{"title":"Inline Magnetron Sputtering for Optical Filters on Flat and Curved Glass Substrates","authors":"D. Gloess, U. Hartung, A. Drescher, J. Neidhardt, P. Frach, H. Bartzsch","doi":"10.1364/oic.2022.tc.7","DOIUrl":null,"url":null,"abstract":"Inline magnetron sputtering allows deposition of precise optical filters on large substrates. Examples of filters deposited on flat and curved glass substrates will be presented.","PeriodicalId":301400,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2022","volume":"2013 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2022","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/oic.2022.tc.7","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Inline magnetron sputtering allows deposition of precise optical filters on large substrates. Examples of filters deposited on flat and curved glass substrates will be presented.