Precision fuzzy sliding-mode tracking control with DNLRX model based friction feed-forward compensator

Abstract

This study developed a precision tracking controller with friction compensation for precision stage. This controller includes two parts, the DNLRX (Dynamic NonLinear Regression with direct application of eXcitation) model based feed-forward controller and sliding-mode feedback controller with adaptive fuzzy uncertainty estimator. Experimental results are shown to demonstrate the efficiency of the proposed controller. The performance of the proposed controller also compared with the integral sliding-mode controller that has been reported recently. The experimental results show that the proposed controller can improve the tracking performance of the system one step further.