Pixel sensor guard-ring geometry optimization by TCAD simulation

Abstract

This paper presents a new approach of designing a n-in-n ATLAS pixel sensor shape inspired form golden ratio by using the golden ratio in the design of the multi guard rings structure. A new configuration is proposed in the goal of optimizing its layout parameter. The performance of the optimized guard rings structure is evaluated with TCAD simulation. It's shown that the optimized structure related to the guard ring designed with the golden ration leads to the high breakdown voltage. The breakdown behavior of the guard ring structure is studied as a function of the golden ration applied to the guard ring parameters, like the width implant, metal width and overhang.