Clément Deleau, H. Seat, H. Tap, F. Surre, O. Bernal
{"title":"Integrated Silicon Nitride Horizontal Long Period Grating for Refractometric Gas Sensing applications","authors":"Clément Deleau, H. Seat, H. Tap, F. Surre, O. Bernal","doi":"10.1109/I2MTC43012.2020.9129170","DOIUrl":null,"url":null,"abstract":"We designed an integrated long period grating based on the horizontal periodic tapering of a silicon nitride channel waveguide. The structure is studied for gas sensing applications, using Styrene AcryloNitrile as sensitive layer. Simulation results from the proposed architecture show a high sensitivity beyond 1700 nm/RIU using a wavelength interrogation method centered at 1550 nm for a 20pm large and 300pm long structure.","PeriodicalId":227967,"journal":{"name":"2020 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)","volume":"46 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 IEEE International Instrumentation and Measurement Technology Conference (I2MTC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/I2MTC43012.2020.9129170","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
We designed an integrated long period grating based on the horizontal periodic tapering of a silicon nitride channel waveguide. The structure is studied for gas sensing applications, using Styrene AcryloNitrile as sensitive layer. Simulation results from the proposed architecture show a high sensitivity beyond 1700 nm/RIU using a wavelength interrogation method centered at 1550 nm for a 20pm large and 300pm long structure.