Box-shaped and A-shaped low-loss waveguides in Si3N4/SiO2 TriPleX technology

2008 5th IEEE International Conference on Group IV Photonics Pub Date : 2008-10-07 DOI:10.1109/GROUP4.2008.4638150

F. Morichetti, A. Melloni, M. Martinelli, A. Leinse, D. Geuzebroek, R. Heideman

引用次数: 1

Abstract

Dielectric waveguides with a box-shaped and an A-shaped cross-section realized in the emerging Si₃N₄/SiO₂ TriPleX technology are experimentally compared. Box-shaped waveguides offer the best compromise between low loss, low polarization-dependent loss and low birefringence.

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Si3N4/SiO2 TriPleX技术中的箱形和a形低损耗波导

实验比较了新型Si3N4/SiO2三工技术中实现的盒形和a形截面介质波导。盒形波导提供了低损耗、低偏振相关损耗和低双折射之间的最佳折衷。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2008 5th IEEE International Conference on Group IV Photonics

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