Towards Portable Thermal Vacuum Sensor-Consideration of Electrical Building Blocks and Compact Housing

Abstract

Multipurpose ICTM thermopile-based MEMS sensors have been successfully demonstrated as gas flow sensor, vacuum sensor, thermal converter and gas type sensor. Apart from further improvement of the sensor's design and performances, one direction of research is working towards realization of portable thermal devices. The aim of this paper is to present preliminary considerations of electrical building blocks and compact housing neccessary to realize a portable thermal vacuum device.