Fluorescence imaging device with an ultra-thin micro-LED

Abstract

In this work, we designed and fabricated an image sensor with an ultra-thin light-emitting diode (LED). The chip has areas with a metal shield for LEDs. An ultra-thin LED fabricated using the laser lift-off technique was mounted on the chip. Excitation and emission filters based on absorption dye were applied to the LED and the pixel array. We also performed a fluorescence imaging experiment by using the fabricated devices.