Fluxgate-Type Magnetic Microsensors for Wide Linear Measuring Range

Abstract

In this paper, we present a microfabricated fluxgate sensor for wide linear measuring range applications. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated Permalloy core layer, and has planar pick-up coils for signal detection. Fabricated sensors are tested in orthogonal and parallel operation modes. The effects of operation modes and excitation conditions are compared. A linear operating range of plusmn900 muT is proved in the orthogonal mode, whereas the same sensor has much lower linear range in the parallel mode. The use of the sensor in a contactless current measurement application is also presented.