Shota Tsuda, Takumi Miyagawa, R. Aono, A. Tomita, H. Hirayama, Y. Takashima, Y. Naoi, K. Nagamatsu
{"title":"Improvement of crystal orientation in AlN with controlled inversion domain","authors":"Shota Tsuda, Takumi Miyagawa, R. Aono, A. Tomita, H. Hirayama, Y. Takashima, Y. Naoi, K. Nagamatsu","doi":"10.1117/12.2607577","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":167554,"journal":{"name":"Gallium Nitride Materials and Devices XVII","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-03-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Gallium Nitride Materials and Devices XVII","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2607577","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}