Large micromirror array designed and tested for multi-object spectroscopy

2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI:10.1109/OMEMS.2012.6318829

M. Canonica, F. Zamkotsian, P. Lanzoni, W. Noell

引用次数: 2

Abstract

MEMS-based programmable slit masks are developed for multi-object spectroscopy in astronomy. Devices with 2048 tiltable micromirrors were fabricated and tested, exhibiting very good surface flatness, high contrast and cryogenic operation ability.

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设计并测试了用于多目标光谱学的大型微镜阵列

基于mems的可编程狭缝掩模用于天文学多目标光谱研究。制作并测试了具有2048个可倾斜微镜的器件，具有良好的表面平整度、高对比度和低温操作能力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2012 International Conference on Optical MEMS and Nanophotonics

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