Application of hydrothermal mechanism for tailor-making perovskite titanate films

Abstract

In this paper, the hydrothermal preparation mechanism for BaTiO/sub 3/ films formed on Ti-covered silicon substrates was successfully applied to the preparation of other titanate films. As the result, [110]-oriented BaTiO/sub 3/ films and epitaxial PbTiO/sub 3/ films were hydrothermally grown on TiO/sub 2//Si and SrTiO/sub 3/ substrates, respectively. Finally, a method combining the hydrothermal process with sol-gel method was positively recommended and realized in the synthesis of perovskite PZT(52/48) films.