Semi-analytical Magnetic-Structural coupling with contact analysis for MEMS/NEMS

Abstract

This paper presents a methodology and a tool for the coupled magnetic-structural with semi-analytical models. For this coupling, the magnetic model is available, we developed the structural-contact model for the cantilever beam and valid it by finite element simulation. This coupling is dedicated to the optimization process of MEMS/NEMS in general and to nano switch in particular.