Fabrication and characterization of periodic nano-faceting structures on patterned vicinal [110] GaAs substrates by MOVPE

Abstract

Recently, various semiconductor nanoscale structures such as quantum wire (QWR) and quantum dot (QD) structures using self-organizing formation method have been widely studied. This method has the advantage that these structures are formed only by crystal growth. Furthermore, the combination of the self-organizing formation and the pre-patterning on the substrate surface improves the size uniformity and the position control of quantum structures. In this paper, fabrication and characterization of periodic nano-faceting structures grown by metalorganic vapor phase epitaxy (MOVPE) on patterned vicinal substrates is presented.