High-Speed Tape Target Transport for Laser Plasma SXPL Source*

Soft-X-Ray Projection Lithography Pub Date : 1900-01-01 DOI:10.1364/sxray.1992.pd2

S. Haney, K. Berger, G. Kubiak, P. Rockett, J. Hunter

引用次数: 0

Abstract

We describe a vacuum-compatible, high-speed tape target drive for use in a high-repetition-rate laser plasma SXPL source. Preliminary results are presented for its operation in vacuum using commercially-available tape and a ~1 J/pulse KrF excimer laser operating at 92 Hz.

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激光等离子体SXPL源的高速带靶传输*

我们描述了一种用于高重复率激光等离子体SXPL源的真空兼容高速磁带目标驱动器。本文介绍了用市售磁带和约1 J/脉冲的KrF准分子激光器在92 Hz下在真空中运行的初步结果。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Soft-X-Ray Projection Lithography

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