Analysis of the vibration of Film Bulk Acoustic wave Resonators based on Mindlin plate theory

Abstract

Analytical solutions for vibration of Film Bulk Acoustic wave Resonators (FBAR) are obtained based on Mindlin plate theory. The electrodes are considered as layers of plates with their own stiffness and mass properties. The differential equations of motion are derived including the thickness-shear and flexural mode. First order approximation is applied to study the vibration of FBAR. The dispersion relation of the vibration and the frequency spectrum are obtained. Numerical results show that the shift of dispersion relation between with and without electrodes consideration.