{"title":"Materials Considerations for Advances in Submicron Very Large Scale Integration","authors":"D. Ferry","doi":"10.1016/S0065-2539(08)61026-4","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":168306,"journal":{"name":"Advances in electronics and electron physics","volume":"6 5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advances in electronics and electron physics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/S0065-2539(08)61026-4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}