{"title":"Silicon Single Crystal Is Still King","authors":"","doi":"10.1201/9781315274164-8","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":288278,"journal":{"name":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","volume":"78 2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1201/9781315274164-8","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}