M. Fazio, Lilly Quintana Barrera, A. Markosyan, R. Bassiri, M. Fejer, Carmen S. Menoniz
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引用次数: 0
Abstract
We present characterization of tantala films mixed with titania or scandia grown by reactive biased target deposition. The introduction of a dopant significantly affected the optical properties of the films and the crystallization temperature.
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