Electro-Optic Barium Titanate Modulators on Silicon Photonics Platform

Abstract

Single crystal barium titanate with both c-axis and a-axis orientation have been epitaxially integrated on silicon-on-insulator wafers. Electro-optic Mach-Zehnder modulators with both X-cut and Z-cut configurations are fabricated that exhibit Pockels coefficients of 180 and 130 pm/V, respectively, with Vpi-length values of <5 V-mm.