Synthesis of ZnO nanoflakes by 1064 nm Nd:YAG pulsed laser deposition in a horizontal tube furnace

Kong Eng Ng, T. Y. Tiong, M. Mohamed, W. Chang, C. Dee, B. Majlis
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Abstract

In this research., a 1064 nm Nd:YAG laser with pulse duration of 8 ns was used to fire ZnO pellet in a furnace using 6 different energy densities. A substrate was placed above the ZnO target which was positioning at an angle of 45° within the frame of the target holder. ZnO nanoflakes were formed on the surface of ceramic., Al2O3substrate was placed upside down on a substrate holder. This simple modification on the substrate orientation has greatly reduced the deposition of useless debris on the substrate. High crystalline ZnO nanoflakes with diameter ranging from 30 to 100 nm were characterized by Field Emission Scanning Electron Microscope (FESEM). Three sharp peaks (100)., (002) and (101) characterized by X-Ray Diffraction (XRD) confirm the deposition of ZnO nanoflakes on the Al2O3substrate. The depositions were remarkable as it required only low tube-furnace vacuum of 3.9 Torr (5.2 mbar) without extra thermal source other than the heat generated by the laser itself.
1064 nm Nd:YAG脉冲激光沉积法制备ZnO纳米片
在这项研究中。利用脉冲持续时间为8 ns的1064 nm Nd:YAG激光器,用6种不同的能量密度在炉中烧制ZnO球团。将衬底置于ZnO靶上,ZnO靶在靶架框架内以45°角定位。在陶瓷表面形成ZnO纳米片。将al2o3衬底倒置放置在衬底支架上。这种对衬底取向的简单修改大大减少了衬底上无用碎屑的沉积。采用场发射扫描电镜(FESEM)对直径为30 ~ 100 nm的高晶ZnO纳米片进行了表征。三个尖峰(100)。(002)和(101)的x射线衍射(XRD)表征证实了ZnO纳米片在al2o3衬底上的沉积。这种沉积是显著的,因为它只需要3.9托(5.2毫巴)的低管炉真空,除了激光本身产生的热量外,没有额外的热源。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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