A novel frequency measurement technique for quartz microbalance systems and other resonator-based sensor systems

2nd ISA/IEEE Sensors for Industry Conference, Pub Date : 2002-11-19 DOI:10.1109/SFICON.2002.1159823

I. Shankar, S. Morris, C. Hutchens

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引用次数: 3

Abstract

This paper describes the operation and design of a simple, low cost period counting system based on a D flip-flop mixer, directly applicable to quartz microbalances and quartz resonator-based sensors. The architecture of the period counting system is based on measuring the period of a low frequency difference signal obtained by subtracting a high stability reference frequency from the unknown frequency to be measured. An analysis of miscount errors caused by phase jitter in the input signals, when the period counting system is used as a quartz resonator based high temperature pressure sensor, is presented. We present a model that predicts miscount rates and discusses design rules to avoid phase jitter induced miscounts. The frequency measurement system was implemented using Peregrine's 0.5 micron silicon-on-insulator (SOI) UTSi/sup /spl reg// process. The integrated system was successfully tested and its functionality verified at 180/spl deg/C ambient temperature. This circuit, implemented as a low power, ultrahigh resolution, frequency measurement circuit, can facilitate the production of inexpensive, high accuracy battery powered sensors.

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一种新的频率测量技术，用于石英微天平系统和其他基于谐振器的传感器系统

本文介绍了一种基于D触发器混频器的简单、低成本周期计数系统的工作原理和设计，该系统直接适用于石英微天平和石英谐振器传感器。周期计数系统的结构是基于测量一个低频差分信号的周期，该信号是通过从待测的未知频率减去一个高稳定性参考频率得到的。分析了周期计数系统作为基于石英谐振腔的高温压力传感器时，输入信号中相位抖动引起的误计数误差。我们提出了一个预测误计数率的模型，并讨论了避免相位抖动引起的误计数的设计规则。频率测量系统采用Peregrine的0.5微米绝缘体上硅(SOI) UTSi/sup /spl reg//工艺实现。集成系统在180/spl℃的环境温度下成功测试并验证了其功能。该电路实现为低功耗、超高分辨率、频率测量电路，可以方便生产廉价、高精度的电池供电传感器。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2nd ISA/IEEE Sensors for Industry Conference,

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