Choice of the mounting beams place considering MEMS disk asymmetric vibration

Abstract

One of the problems in MEMS devices design is proper choice of the mounting elements place. It is supposed that mountings beams should be placed in quasi nodes of disks asymmetric inplane displacements to minimize the loss through the supporting beams. In this paper is provided simulation of the thin piezoelectric disks particles asymmetric in-plane displacements considering its electrodes form. The place of quasi nodes was found for disks three first resonant frequencies.