Industrialization of Si-Photonics into a 300mm CMOS fab

Abstract

Recently Silicon Photonics received a lot of interest due to the increased need of high-data rate and low-cost transceivers in datacenters, mainly driven by cloud applications. In this paper we will demonstrate the industrialization of Si-Photonics in a CMOS fab addressing the datacenter market and more particularly the 100Gbits/s PSM-4 standard operating at 1310nm wavelength.