Microfabrication of wideband distributed beam amplifiers at 220 GHz

2011 IEEE International Vacuum Electronics Conference (IVEC) Pub Date : 2011-02-21 DOI:10.1109/IVEC.2011.5747016

C. Joye, J. Calame, K. Nguyen, D. Pershing, P. Larsen, M. Garven, Doewon Park, R. Bass, B. Levush

引用次数: 12

Abstract

Wideband, distributed beam amplifiers are under development at NRL. We report on microfabrication techniques used to construct several types of millimeter wave planar amplifier circuits using Ultraviolet Lithography (UV-LIGA).

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220 GHz宽带分布式波束放大器的微细加工

NRL正在开发宽带分布式波束放大器。我们报道了利用紫外光刻技术(UV-LIGA)构建几种毫米波平面放大电路的微加工技术。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2011 IEEE International Vacuum Electronics Conference (IVEC)

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