Germanium Fin Photodiode with 3dB-Bandwidth >110 GHz and High L-Band Responsivity

Abstract

We present a germanium p-i-n photodiode with a 3dB-bandwidth beyond 110 GHz at 1610 nm, a high responsivity of >0.45 A/W at L-band wavelengths up to 1620 nm and a moderate dark current level of around 500 nA, all at -2V.