Time of Flight Measurement During Femtosecond Laser Ablation of Gallium Arsenide

Abstract

Time of flight (TOF) distributions of evaporated particles from the surface of GaAs have been measured in order to determine its maximum temperature during femtosecond irradiation (100 fs, 620 nm). A quadrupole mass spectrometer (QMS) provides the TOF distribution of a given particle mass after laser excitation.