{"title":"Fabrication of quartz micro-capillary electrophoresis chips for health care devices","authors":"T. Kikuchi, T. Ujiie, T. Ichiki, Y. Horiike","doi":"10.1109/IMNC.1999.797535","DOIUrl":null,"url":null,"abstract":"We proposed the \"health care device\", which is an intelligent micro-analytical system for the on-chip inspection of human health. As a first step we have fabricated a quartz micro-capillary electrophoresis chip using high density plasma etching and demonstrated its high-performance capillary electrophoresis operation.","PeriodicalId":120440,"journal":{"name":"Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-07-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Digest of Papers. Microprocesses and Nanotechnology '99. 1999 International Microprocesses and Nanotechnology Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMNC.1999.797535","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 5
Abstract
We proposed the "health care device", which is an intelligent micro-analytical system for the on-chip inspection of human health. As a first step we have fabricated a quartz micro-capillary electrophoresis chip using high density plasma etching and demonstrated its high-performance capillary electrophoresis operation.