A low-noise low-offset chopper-stabilized capacitive-readout amplifier for CMOS MEMS accelerometers

Abstract

A CMOS chopper-stabilized amplifier with both DC and AC offset cancellation, for capacitive readout of motion in MEMS structures, achieves 40 nV//spl radic/HZ noise floor, 10 mV DC offset, and 40 dB sensor offset reduction. The amplifier, integrated into a CMOS-MEMS accelerometer, achieves 50 /spl mu/g//spl radic/Hz noise floor.