Grating design for packaged wavelength selective infrared emitter using surface plasmon polariton

S. Yahagi, H. Ishihara, M. Ishii, S. Kumagai, M. Sasaki
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Abstract

Plasmonic thermal emitter is promising for improving the efficiency of the gas sensor generating the infrared matched with the gas absorption band. The combination with the microheater in the vacuum packaged setup will further reduce the thermal loss. Here, considering CO2 gas sensing, the grating design robust against the dimension error is examined.
采用表面等离子激元的封装波长选择性红外发射器的光栅设计
等离子体热发射极有望提高气体传感器产生与气体吸收波段相匹配的红外的效率。与真空封装装置中的微加热器相结合将进一步减少热损失。考虑到CO2气体传感,检验了光栅设计对尺寸误差的鲁棒性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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