CMOS CW tunable III–V microdisk LASERs for optical interconnects in integrated circuits

Abstract

Full CMOS compatible microdisk LASERs have been fabricated on 200 mm SOI wafers. CW operation with a sub-mW threshold is obtained with low voltage operation. Coupling the microdisk to a pseudo cavity, formed by a photonic crystal and the coupled waveguide itself, we also demonstrate mode hopping and multimode emission thanks to an active control of its optical paths.