High-Density Coplanar Strip-Line Mach-Zehnder Modulators in a InP Generic Platform

Abstract

A high-density, 27µm wide, Mach-Zehnder modulator with a new coplanar strip-line electrode enables velocity and impedance matching, increasing the 3dB electro-optical bandwidth to 27.3 GHz, 3.6 times higher than a more conventional coplanar waveguide design with similar length, waveguide parameters, and n-doped substrate.