Piezoelectric membrane actuator design

2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems Pub Date : 2011-04-18 DOI:10.1109/ESIME.2011.5765797

F. Casset, M. Cueff, E. Defay, G. Le Rhun, A. Suhm, P. Ancey, A. Devos

引用次数: 5

Abstract

This paper presents the study of piezoelectric actuators. After the description of simulated actuators and simulation conditions, results will be discussed to define the best actuator design in terms of membrane displacement and compactness. The actuator behaviour under temperature variation is also checked.

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压电膜致动器设计

本文对压电作动器进行了研究。在描述了仿真执行器和仿真条件之后，将讨论结果，以从膜位移和紧凑性方面定义最佳执行器设计。执行器在温度变化下的行为也被检查。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems

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