W. Sweatt, J. W. Weed, A. Farnsworth, M. Warren, C. C. Neumann, R. Goeke, R. Shagam
{"title":"Improving the Figure of Very Good Mirrors by Deposition","authors":"W. Sweatt, J. W. Weed, A. Farnsworth, M. Warren, C. C. Neumann, R. Goeke, R. Shagam","doi":"10.1364/eul.1996.dfo149","DOIUrl":null,"url":null,"abstract":"Mid-spatial frequency errors of near-perfect mirrors can be reduced by deposition through a computer-generated mask without degrading the superpolish. Experimental results are presented.","PeriodicalId":201185,"journal":{"name":"Extreme Ultraviolet Lithography (TOPS)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1996-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Extreme Ultraviolet Lithography (TOPS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/eul.1996.dfo149","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
Mid-spatial frequency errors of near-perfect mirrors can be reduced by deposition through a computer-generated mask without degrading the superpolish. Experimental results are presented.